AIR CLEANER AND CLEAN ROOM USING IT
PURPOSE:To remove the dust contained in the air in the space of high cleanliness, such as a clean room, as well as the gaseous material working as the contaminant source of product by providing an adsorption filter in front of an air cleaning filter. CONSTITUTION:When the air taken in from an air ta...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PURPOSE:To remove the dust contained in the air in the space of high cleanliness, such as a clean room, as well as the gaseous material working as the contaminant source of product by providing an adsorption filter in front of an air cleaning filter. CONSTITUTION:When the air taken in from an air taking-in opening 6 is blown out from an air blowing-out opening 5, the air is cleaned by the air cleaning filter 10 provided in the vicinity of the air blowing-out opening 5. The adsorption filter 9 is provided in front of the air cleaning filter 10. As a result, the dust contained in the air in the space of high cleanliness, such as a clean room, as well as the gaseous material working as the contaminant source of product are removed. |
---|