AIR CLEANER AND CLEAN ROOM USING IT

PURPOSE:To remove the dust contained in the air in the space of high cleanliness, such as a clean room, as well as the gaseous material working as the contaminant source of product by providing an adsorption filter in front of an air cleaning filter. CONSTITUTION:When the air taken in from an air ta...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SAITOU SHIYUUSAKU, KAJIMA TOMOAKI, SUZUKI YOSHINOBU
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PURPOSE:To remove the dust contained in the air in the space of high cleanliness, such as a clean room, as well as the gaseous material working as the contaminant source of product by providing an adsorption filter in front of an air cleaning filter. CONSTITUTION:When the air taken in from an air taking-in opening 6 is blown out from an air blowing-out opening 5, the air is cleaned by the air cleaning filter 10 provided in the vicinity of the air blowing-out opening 5. The adsorption filter 9 is provided in front of the air cleaning filter 10. As a result, the dust contained in the air in the space of high cleanliness, such as a clean room, as well as the gaseous material working as the contaminant source of product are removed.