FORMATION OF RADIATION SENSITIVE MIXTURE AND RELIEF PATTERN FOR PHOTOSENSITIVE COATING MATERIAL
PURPOSE: To improve activity by forming a polymer binder insoluble in water, soluble in aq. alkaline solution and containing a specific compound from a copolymer having o-nitrobenzyl group. CONSTITUTION: The polymer binder insoluble in water and soluble in the alkaline aq. solution is the copolymer...
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