FORMATION OF RADIATION SENSITIVE MIXTURE AND RELIEF PATTERN FOR PHOTOSENSITIVE COATING MATERIAL

PURPOSE: To improve activity by forming a polymer binder insoluble in water, soluble in aq. alkaline solution and containing a specific compound from a copolymer having o-nitrobenzyl group. CONSTITUTION: The polymer binder insoluble in water and soluble in the alkaline aq. solution is the copolymer having o-nitrobenzyl group and contains 1-40mol% compound expressed by formula I and 99-60mol% compound expressed by formula II. A expresses 5- to 14-membered aromatic or heteroaromatic ring, X expresses hydrogen, a 1-8C alkyl, an aryl or an aralkyl group, Y expresses a 2-10C ethylenic unsaturate group, R expresses hydrogen or methyl, R expresses hydrogen, halogen or a 1-6C alkyl group, R expresses hydrogen, a 1-6C alkyl, an acetyl, a benzoil, a 1-6C alkylsilyl group or a 1-6C alkoxysilyl. As a result, the high activity is attained.