ELECTRODELESS DISCHARGING TUBE APPARATUS FOR MICROWAVE
PURPOSE:To make emission stable instantaneously by a method wherein a discharging tube of an ultraviolet ray source is made electrodeless, and microwaves are absorbed into the discharging tube with a microwave coupling portion whose antenna portion is provided in parallel with the discharging tube....
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To make emission stable instantaneously by a method wherein a discharging tube of an ultraviolet ray source is made electrodeless, and microwaves are absorbed into the discharging tube with a microwave coupling portion whose antenna portion is provided in parallel with the discharging tube. CONSTITUTION:With a microwave electrodeless discharging tube 15 which causes plasma discharge with excitation of microwave used as an ultraviolet ray source, this discharging tube 15 is placed in a cavity with its one face opened to realize constitution wherein microwaves generated by a microwave generator are supplied via a waveguide 13 by a microwave coupling portion 14 consisting of at least a pair of conductors, whose one end is fixed to the waveguide 13 or a wall of the cavity, provided in parallel with the electrodeless discharging tube 15. In other words, the microwaves are supplied to the discharging tube 15 by an antenna portion 14-1 of the microwave coupling portion 14, and plasma is generated in the discharging tube 15. By placing the antenna portion 14-1 approximately in parallel with the discharging tube 15, the microwaves can be efficiently absorbed in the discharging tube 15, thereby permitting emission of the discharging tube 15 to be stable. |
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