DEVICE FOR POLISHING DISK

PURPOSE:To minutely regulate the pressing force of a pressurizing roller and facilitate the regulation of this load by providing a load regulating means which displaces each supporting member in a direction perpendicular to a disk face to regulate the pressing force of the pressurizing roller to a d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HIRATSUKA TERUO, MIYAJIMA SHUNEI, HIWATARI SHOTARO
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PURPOSE:To minutely regulate the pressing force of a pressurizing roller and facilitate the regulation of this load by providing a load regulating means which displaces each supporting member in a direction perpendicular to a disk face to regulate the pressing force of the pressurizing roller to a disk by means of the supporting members. CONSTITUTION:When the pressing force of a pressurizing roller 5 against a disk 1 is not uniform due to assembling error, etc., as the head 23a of one micrometer 22a is extended, the pressing force on the inner periphery side of the disk 1 in the pressurizing roller 5 is increased whereas, when the head 23a is contracted, the pressing force on the inner periphery side is reduced. On the other hand, as the head 23b of other micrometer 22b is extended, the pressing force to the portion of the outer periphery side in the pressurizing roller 5 is increased whereas, when the head 23b is contracted, the pressing force to the outer periphery side portion is reduced. Thereby, the pressing force can be made uniform.