SIMPLE PROCESS FOR PRODUCTION OF MONOSILANE

PURPOSE:To extremely easily and economically produce a monosilane by treating dichlorosilane in the presence of a catalyst at a specific reaction temperature using a specific reaction method. CONSTITUTION:A catalyst (e.g., polymeric sulfonic acid amine salt catalyst) is filled in a vertical reaction tube and a dichlorosilane is introduced into the reaction tube at a part filled with the catalyst or below the filled part to effect the disproportionation reaction of the dichlorosilane at a temperature below the boiling point of the dichlorosilane and above the boiling point of monosilane. The conosilane is taken out of the reaction tube from a part above the filled part and the trichlorosilane and tetrachlorosilane are discharged from a part below the filled part. The objective monosilane can be produced by the above process with single reaction apparatus using an extremely simple means at a concentration considerably higher than at least the equilibrium composition of dichlorosilane. The concentration of the produced monosilane is nearly 100%.