MEASURING INSTRUMENT FOR FLAT PASSAGE TYPE SEMICONDUCTOR DEVICE

PURPOSE:To improve a measurement yield by slanting an elastic plate type contactor which is held by a holding block at a slanting part, bringing the tip of the contactor into contact with the slanting part of a lead, and preventing the mount surface of the lead from flawing. CONSTITUTION:When it is confirmed that the semiconductor device 1 to be measured is conveyed to an inspection position 1, the slanting part 10 operates to slant the tip of the plate type contactor 8 held by the holding block so that the tip contacts the slanting part 7 of the lead of the device 1 as shown by an alternate long and shart dash line. The contact surface of the tip of the contactor 8 as this time is rubbed against the slanting part 7 of the lead at all times to remove dirt, thus obtaining self-cleaning operation. In this state, inspection is started by a tester through an inspection board 6. The slanting part 10 is restored to its original shape after the inspection and the devices 1 are conveyed and inspected one after another. Consequently, the mount surface of the lead is prevented from flawing and the measurement yield is improved.