X-RAY PHOTOELECTRON ANALYZER

PURPOSE:To facilitate the study of the results of analysis, by varying an amplitude of a deflection signal in linkage with the setting of a selection energy for an energy analyzer to allow direct implementation of a mutual comparison of X-ray photoelectron images with various energies. CONSTITUTION:An electron lens system L makes electrons radiated from the surface of a sample converge onto a layout surface of an incident slit Is of an energy analyzer E to form an electron image on the surface of the sample. x- and y-way deflection electrodes Px and Py are arranged between the sample S and the system L. In the analyzer E, among electrons incident through the slit Is, the electrons pass through a slit Io being made to converge onto the slit with a specified energy determined by a voltage applied between electrodes of the analyzer E and detected with an electron detector D. A controller C determines a fundamental value of saw-tooth waves of (x) deflection and (y) deflection signals according to a scanning range. On the other hand, the fundamental value is multiplied by a coefficient proportional to a voltage applied to the analyzer E, namely, a selection energy value. Thus, both (x) and (y) way digital deflection signals are outputted to an (x) way deflection voltage generation circuit Vx and a (y) way deflection voltage generation circuit Vy to scan the surface of the sample.