PROBE CARD AND TESTING METHOD USING THIS CARD

PURPOSE:To conduct a stable test and to improve the efficiency of test operation by providing a fixation member for supporting the probe card to the peripheral edge of the electric connection part of a 1st wiring substrate detachably, and composing this fixation member of a nonelastic member. CONSTITUTION:The probe card 6 is constituted by providing a connection part to the entire peripheral edge of an opening part 7a bored nearly; in the center of the 1st wiring board, e.g. printed board 7. Further, the fixation member 6a composed of the nonelastic member while being insulated from the surface of the board 7 is provided detachably to the outer periphery of the connection part. Namely, the small-deflection connection part of the board 7 is provided detachably to the side of a testing machine main body by the nonelastic member, so the card 6 is never resonated by vibration from the testing machine main body. Therefore, the member 6a is provided with the board 7 and a 2nd wiring board, e.g. probe stylus board 9 and the member 6a is usable while being fixed to the testing machine main body, so the board 7 is detached from the member 6a and replaced according to a test item and the kind of a test.