METHOD FOR PURIFYING NITROGEN TRIFLUORIDE GAS

PURPOSE:To efficiently, safely and economically remove dinitrogen difluoride which is an impurity contained in nitrogen trifluoride gas, by heating the nitrogen triloride gas in a vessel having the inner wall coated with nickel fluoride at a specific temperature. CONSTITUTION:Nitrogen trifluoride co...

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Hauptverfasser:	HOKONOHARA HISASHI, YAMAGUCHI TOSHIAKI, HARADA ISAO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
Online-Zugang:	Volltext bestellen
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