VIBRATION ACCELERATION SENSOR

PURPOSE:To reduce an output signal which is generated by temperature variation and to obtain the high-accuracy vibration acceleration sensor by forming symmetrical electrodes on the top and reverse surfaces of a plate type piezoelectric element and polarizing only a curvature vibration mode vibrator part. CONSTITUTION:A U-shaped cut 4 (slit) is formed by laser working in a stuck piezoelectric element 1 structured by sticking plate type piezoelectric elements 2 and 3 which have polarization axes in the thickness directions and symmetrical electrodes formed on their top and reverse surfaces, and the part surrounded with the slit 4 form the curvature vibration mode vibrator 5 of cantilever structure. The periphery of the vibrator 5 is sandwiched between fixing members 6 and 7 made of metal, etc., with large heat conductivity and fixed by adhesion, etc., so that spaces are formed above and below the vibrator 5. This structure is employed to conduct the heat from the periphery to the vibrator 5 as an acceleration detection part almost uniformly, thereby reducing a temperature gradient with the place.