ALIGNER FOR PRINTED CIRCUIT BOARD
PURPOSE:To bring close contact transparent boards into close contact corresponding to the variation in the different thicknesses of the substrates and to uniformly pressurize them by composing the outer periphery and pressurizing part of the board elevationally movably. CONSTITUTION:A sealing rubber...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PURPOSE:To bring close contact transparent boards into close contact corresponding to the variation in the different thicknesses of the substrates and to uniformly pressurize them by composing the outer periphery and pressurizing part of the board elevationally movably. CONSTITUTION:A sealing rubber material 14d having bendability and shrinkage is adhered to a cut part 14c, and an outer periphery 14a and a pressurizing part 14b are attached by the material 14d elevationally movably. Thus, a substrate 15 interposed between photomasks 16a and 16b is placed on a transparent base plate 12, and the material 14c of a close contact transparent plate 14 is disposed outside to adhere the plate 14 on a vacuum packing 13. Thus, when it is evacuated in vacuum, the pressurizing part 14b of the plate 14 is moved elevationally according to the height of the thickness of the substrate 15 in close contact with the whole mask 14a, and can be uniformly pressurized. Since the substrate and the photomask can be brought into close contact with each other over the whole surfaces in this manner, scattered ultraviolet rays are not invaded thereinto, thereby forming an accurate circuit. |
---|