DEVICE FOR FORMING THIN ORGANIC FILM

PURPOSE:To form a thin org. film which is uniform in structure and is defect- free by forming substrate guide groove to one side face opposite to the movable barrier of a trough. CONSTITUTION:The trough 10 for housing the liquid for developing molecular groups for film formation is provided and the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	EKUSA TAKASHI, NAKAYAMA TOSHIO, MIURA AKIRA
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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