DEVICE FOR FORMING THIN ORGANIC FILM

PURPOSE:To form a thin org. film which is uniform in structure and is defect- free by forming substrate guide groove to one side face opposite to the movable barrier of a trough. CONSTITUTION:The trough 10 for housing the liquid for developing molecular groups for film formation is provided and the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: EKUSA TAKASHI, NAKAYAMA TOSHIO, MIURA AKIRA
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To form a thin org. film which is uniform in structure and is defect- free by forming substrate guide groove to one side face opposite to the movable barrier of a trough. CONSTITUTION:The trough 10 for housing the liquid for developing molecular groups for film formation is provided and the movable barrier 15 for compressing the surface area of a monomolecular layer developed on the water surface of the trough 10. The substrate guide groove 13 is provided on one side opposite to the movable barrier 15 of the trough 10. The barrier driving part and the substrate driving part are controlled to make desired actions simultaneously under the conditions of the specified change rare of the area so that the behavior to compress the monomolecular film on the water surface by the movable barrier 5 is executed and that the operation to transfer the molecules onto the substrate 11 by submerging and emerging the substrate 11 into and out of the water surface in the trough 10 through the guide groove 13 is made to follow up the compression behavior of the monomolecular film. The monomolecular film of the org. molecules is thereby uniformly accumulated on the substrate 11 without having defects.