PRESSURE SENSITIVE SENSOR

PURPOSE:To prevent contamination of a sensor and to improve water resistance, pressure sensitive characteristic and reliability by mounting a pressure sensor chip on a cavity and providing a pressure medium having a thin polymer film on the surface of the elastomer covering the upper part thereof. C...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUJIMOTO IKUO, HASHIMOTO HIROKAZU, TAKIZAWA ISAO, KUNIMURA SATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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