PRESSURE SENSITIVE SENSOR

PURPOSE:To prevent contamination of a sensor and to improve water resistance, pressure sensitive characteristic and reliability by mounting a pressure sensor chip on a cavity and providing a pressure medium having a thin polymer film on the surface of the elastomer covering the upper part thereof. CONSTITUTION:A pedestal 1 and a package 2 consisting of a plastic molding body are usually produced by an integral mold. The pressure sensor 3 consists of a diaphragm made of a thin silicon single crystal film mounted on the upper part thereof. The surface of the elastomer 5 covering a lead 4 and the upper part of the pressure sensor 3 is covered by the thin polymer film 6. A silicone polymer or oil-filled norbornene polymer which is relatively soft and has the high pressure sensitivity is applied for the elastomer to be used therein and is more preferably a silicone gel. The contamination of the sensor is thereby prevented and the water resistance, pressure sensitive characteristic and reliability are enhanced.