CONTROLLER OF MAGNETIC BEARING TURBO MOLECULAR PUMP

PURPOSE:To protect the transmission signal from various kinds of electromagnetic noise by connecting an operating side controller of a magnetic bearing turbo molecular pump to a pump side controller via a photo fiber cable. CONSTITUTION:A pump side controller 2 which drives and controls a magnetic b...

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Bibliographische Detailangaben
1. Verfasser:	FURUICHI YASUTAKA
Format:	Patent
Sprache:	eng
Schlagworte:	BEARINGS BLASTING ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS THERMAL INSULATION IN GENERAL WEAPONS
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