CONTROLLER OF MAGNETIC BEARING TURBO MOLECULAR PUMP

PURPOSE:To protect the transmission signal from various kinds of electromagnetic noise by connecting an operating side controller of a magnetic bearing turbo molecular pump to a pump side controller via a photo fiber cable. CONSTITUTION:A pump side controller 2 which drives and controls a magnetic b...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	FURUICHI YASUTAKA
Format:	Patent
Sprache:	eng
Schlagworte:	BEARINGS BLASTING ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS THERMAL INSULATION IN GENERAL WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PURPOSE:To protect the transmission signal from various kinds of electromagnetic noise by connecting an operating side controller of a magnetic bearing turbo molecular pump to a pump side controller via a photo fiber cable. CONSTITUTION:A pump side controller 2 which drives and controls a magnetic bearing is mounted inside a magnetic bearing turbo molecular pump 1. An operating side controller 3 which sends the control signal to said pump side controller 2 is placed separately from the magnetic bearing turbo molecular pump 1. A communication line which communicates the pump side controller 2 with the operating side controller 3 is laid by connecting pair of photo-to- electricity convertor 4 to each other via a photo fiber cable 5.