REFLECTION TYPE SURFACE INSPECTION INSTRUMENT
PURPOSE:To securely perform defect inspection by photographing an image of light reflected by a body to be inspected by the projection of light from a projector for irradiating the body with the light and seen on the back surface of a transparent screen through the screen. CONSTITUTION:The light emi...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To securely perform defect inspection by photographing an image of light reflected by a body to be inspected by the projection of light from a projector for irradiating the body with the light and seen on the back surface of a transparent screen through the screen. CONSTITUTION:The light emitted by the projector 2 is reflected by the body 1 and photodetected nearby the center of the transparent screen 3. This inspection device 7 is moved along a rail 9 to confirm that the reflected light does not move out of on the transparent screen 3. After said adjustment, the light is projected on an optional position on the body 1 and its reflected light is received by the transparent screen 3. Then, reference area for deciding whether or not there is a defect by a detector 6 is set according to the image of the reflected light on the transparent screen 3. Further, a constant area is set which has its center at the image of the reflected light. Then while the body 1 is rotated, the this inspection device is moved gradually from one end to the other end by a scanner operation device 12 to inspect whether or not there is the defect. It is judged that there is the defect when the area of the image of the reflected light on the transparent screen 3 which is picked up by a camera 4 during the inspection exceeds said set area and the position of the image moves out of said set area. |
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