PROBE CARD

PURPOSE:To enable high-accuracy, high-speed measurement by uniformalizing the surface resistance of the conductor pattern of the probe card. CONSTITUTION:On the probe card 1, conductor patterns 40 from respective probe styli 20 to respective terminals 30 are substantially equal in surface resistance. Further, through-holes 50 are so provided that conductor patterns 40a from the probe styli 20 to the through-holes 50 are equal in line width and equal in pattern length. Further, conductor patterns 40b from the through-holes 50 to the terminals 30 increase in pattern width in proportion to their distances. Consequently, the patterns 40, 40a, and 40b are equal in surface resistance regardless of the distances from the probe styli 20 to the terminals 30, so the delay of electric signals based upon the distances is eliminated. Further, even when signals are led out of the through holes 50, the distances from the probe styli 20 to the through holes 50 are equal, so the signals are not delayed and the high-accuracy measurement is performed.