INSPECTION PROBER OF FINE PATTERN

PURPOSE:To inspect an electrical characteristic without generating damage or disconnection, by pressing a prober to an electrode formed from a conductor composed of a metal or the like through anisotropic conductive rubber. CONSTITUTION:A fixing finger 2 for fixing a membrane transistor substrate 7 and anisotropic conductive rubber 3 are mounted to a membrane transistor substrate inspecting machine 1. The substrate 7 being an object to be inspected is fixed to the rubber 3 by the finger 2 and a prober unit 5 is moved up and down by an actuator 6 and a large number of probers 4 are brought into contact with each piexel electrode 8 through the rubber 3 to detect a signal (voltage). By this constitution, the disconnection of each electrode 8 or line is not generated and the substrate 7 can be electrically measured.