JP2992748B

PROBLEM TO BE SOLVED: To provide a catalytic combustion type gas sensor resistant to vibration and impact, highly sensitive and having high response speed in which a sensor element is miniaturized to save the driving power consumption by forming a filmy combustion part on the surface of a coil. SOLUTION: A sensitive element 10 is formed of a heater part 11 formed by winding platinum or its alloy into coil form, and a combustion part 12 formed of a porous oxide semiconductor film having pores formed on the surface of the heater part and a catalyst dispersed on the surface thereof. A compensating element 12 is formed of a heater part 14 formed in the same manner as the element 10 and a porous oxide semiconductor film 15 formed on the surface of the heater part 14, but a catalyst such as platinum or palladium is not contained in the surface. The element 10 and the element 13 are connected to two electrode terminal pins of a package, respectively, so that they are arranged in line within the package, electrically connected to the electrode terminal pins, and covered with a cover.