JP2972665B

PROBLEM TO BE SOLVED: To enable the inspection result of an electronic device to be analytically processed with high efficiency, by a method wherein inspection data outputted from an inspection device are discontinuously transmitted to a processing device. SOLUTION: Works such as electronic devices...

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Bibliographische Detailangaben
Hauptverfasser: NAKAZATO JUN, TANIGUCHI JUZO, SHIMOSHA SADAO, SAKATA MASAO, HASHIMOTO TAIZO, OOYAMA JUICHI, MATSUOKA KAZUHIKO, ISHIKAWA SEIJI, NAGATOMO HIROTO, SATO OSAMU, MURAMATSU KIMIO, EBARA, OKABE TSUTOMU, SAKAMOTO JUZABURO
Format: Patent
Sprache:eng
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