JP2972665B

PROBLEM TO BE SOLVED: To enable the inspection result of an electronic device to be analytically processed with high efficiency, by a method wherein inspection data outputted from an inspection device are discontinuously transmitted to a processing device. SOLUTION: Works such as electronic devices are inspected by a first and a second inspection devices, 1, 4, and 7. Data obtained by inspecting works with the first inspection devices 1 and 4 are transmitted to first processing devices 2 and 5, and data obtained by inspecting works with the second inspection device 7 are transmitted to a second processing device 8. In an inspection system mentioned above, inspection data obtained by inspecting works with the inspection devices, 1, 4, and 7 are transmitted after the works are inspected. For instance, when the inspection of a lot of works is finished through a foreign object inspection device, foreign object control data and foreign object inspection data concerning the above lot of works are transmitted to a foreign object data analysis station 2. When the inspection of a wafer is finished through an appearance inspection device 4, appearance defect control data and appearance defect data are transmitted to an analysis station 5.