JP2910944B

PURPOSE:To suppress plasma vibration and take out a charged particle having less energy width. CONSTITUTION:An intermediate electrode 11 is insulated from a filament chamber F and a discharge chamber D, and connected to the plus side of a discharge power source 20 through a load resistor 21. A scree...

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Bibliographische Detailangaben
Hauptverfasser:	HARA TAMIO, HAMAGAKI MANABU, KUSAKABE KAZUTOSHI, AOYANAGI KATSUNOBU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PURPOSE:To suppress plasma vibration and take out a charged particle having less energy width. CONSTITUTION:An intermediate electrode 11 is insulated from a filament chamber F and a discharge chamber D, and connected to the plus side of a discharge power source 20 through a load resistor 21. A screen electrode 12 is insulated from the discharge chamber D and an accelerating chamber A, and connected to the plus side of the discharge power source 20. An accelerating electrode 13 is insulated from the accelerating chamber A and a chamber 1, and connected to the plus side of an accelerating power source 22. The plus side of the accelerating power source 22 is connected to an earth, and the minus side to the plus side of the discharge power source 20. A filament 10 is connected to an AC power source 25 through a filament transformer 24. A capacitor 31 is inserted between the screen electrode 12 and the accelerating electrode 13. When the capacitor 31 is inserted, plasma vibration is remarkably minimized.