JP2902943B

PURPOSE:To reduce the volume of chambers and save labor for film formation operation by providing a feed chamber and a reeling chamber with doors that are capable of vacuum-sealing and being opened/closed, moving flexible substrate reeled bodies through such opening/closing sections, and supporting...

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Bibliographische Detailangaben

1. Verfasser:	KYOFUJI SHINJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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