JP2902943B

PURPOSE:To reduce the volume of chambers and save labor for film formation operation by providing a feed chamber and a reeling chamber with doors that are capable of vacuum-sealing and being opened/closed, moving flexible substrate reeled bodies through such opening/closing sections, and supporting them between core supporting bodies. CONSTITUTION:A core 31 around which flexible substrates 1 are to be wound is carried along forward/backward travel rails 71 into a feed chamber 21, where the core 31 is supported between a fixed side tapered cone 5 and a tightening side tapered cone 52, driven by a cylinder 81, in such a way that it is rotatable. The core travels from the feed chamber through film formation chambers 22, 23 to a reeling chamber 24, where the core 31 is supported between a fixed side tapered cone 51 and a tightening side tapered cone 52. While the core 31 is conveyed to the reeling chamber, flexible substrates 1 are wound around it. The feed chamber 21 and the reeling chamber 24 are hermetically vacuum-sealed by means of doors 6, 61. The core 31 with substrates with films formed wound around it is released from the fixed side tapered cone 51 and the tightening side tapered cone 52, and carried out of the reeling chamber 24 via a forward/backward guide 71.