JP2887145B

Process producing metallic alkyl compounds of formula (I): MR3?, where M stands for In, Ga or Al, and R stands for C1-10? alkyl, which may be branched chain, cyclic or unsaturated, and C6-10? aryl, whereby said compounds can be obtained with high yield and of particularly high purity suitable for ep...

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Hauptverfasser:	UORUFURAMU PEETAA, RAIERU FURIIDORITSUHIIUIRUHERUMU, SHUUMAN HERUBERUTO
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY ORGANIC CHEMISTRY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Process producing metallic alkyl compounds of formula (I): MR3?, where M stands for In, Ga or Al, and R stands for C1-10? alkyl, which may be branched chain, cyclic or unsaturated, and C6-10? aryl, whereby said compounds can be obtained with high yield and of particularly high purity suitable for epitaxy.