JP2772086B

PURPOSE:To prevent aluminum dust adhering to a probe from falling on a wafer owing to vibration produced upon indexing by forcing the wafer and a probe card to be stationary and indexing a test head side to measure an IC chip successively. CONSTITUTION:An IC chip is tested by fixing a wafer 6 on a s...

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Bibliographische Detailangaben

1. Verfasser:	SAKAI IWAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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