JP2657695B

PURPOSE:To obtain an amorphous tantalum pentoxide-based insulating film having >=8.0muc/cm performance index over a wide area by coating a substrate with a tantalum alkoxide-contg. sol adjusted to a specified concn. by hydrolysis, heat-treating the coated substrate and repeating the coating and h...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OKAMOTO SAYURI, TAKAHASHI KEN, OOISHI TOMOJI, NAKAZAWA TETSUO
Format: Patent
Sprache:eng
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