JP2657695B

PURPOSE:To obtain an amorphous tantalum pentoxide-based insulating film having >=8.0muc/cm performance index over a wide area by coating a substrate with a tantalum alkoxide-contg. sol adjusted to a specified concn. by hydrolysis, heat-treating the coated substrate and repeating the coating and h...

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Bibliographische Detailangaben
Hauptverfasser:	OKAMOTO SAYURI, TAKAHASHI KEN, OOISHI TOMOJI, NAKAZAWA TETSUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CABLES CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE CONDUCTORS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING INSULATORS NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PURPOSE:To obtain an amorphous tantalum pentoxide-based insulating film having >=8.0muc/cm performance index over a wide area by coating a substrate with a tantalum alkoxide-contg. sol adjusted to a specified concn. by hydrolysis, heat-treating the coated substrate and repeating the coating and heat treating stages. CONSTITUTION:A sol contg. prescribed amts. of tantalum alkoxide, water and hydrochloric acid is prepd. by partially hydrolyzing tantalum alkoxide used as starting material. A substrate 3 with a vapor-deposited electrically conductive transparent film 2 is spin-coated with the sol and heat-treated at a prescribed temp. and these coating and heat treating stages are repeated by prescribed times. An amorphous transparent dense film 1 having >=8.0muc/cm performance index is produced as an insulating film. Since a large-sized vacuum device is not required, the film is easily obtd. over a large area.