JP2642881B

The present invention is to provide a method for detecting hydrogen with ultra high sensitivity based on slow multiply-charged ion wherein damages of a target surface can be remarkably reduced and a quantitative analysis of hydrogen atoms on a solid surface can be compactly realized with extremely h...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUMYA CHOICHI, YAMAZAKI YASUKI, AZUMA TOSHUKI, KUROKI TATEO, KOMAKI KENICHIRO
Format: Patent
Sprache:eng
Schlagworte:
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