JP2642881B

The present invention is to provide a method for detecting hydrogen with ultra high sensitivity based on slow multiply-charged ion wherein damages of a target surface can be remarkably reduced and a quantitative analysis of hydrogen atoms on a solid surface can be compactly realized with extremely high efficiency by employing slow multiply-charged ions derived from an ion source for efficiently generating multiply-charged ions. The present invention relate to a method of ultra high sensitivity hydrogen detection based on slow multiply-charged ions comprising: arranging an EBIS type slow multiply-charged ion source for generating slow multiply-charged ions having potential energy higher than kinetic energy, a Wien filter type mass analyzer, a deflector for producing a pulsed ion beam, an acceleration ring provided with apertures lenses and a secondary ion detector, a target on a Cu mesh provided on the acceleration ring and a secondary electron multiplier in order on a beam line for carrying ions from the ion source, detecting secondary ions generated upon the collision of slow multiply-charged ions with the target by accelerating the secondary ions toward the secondary ion detector, detecting secondary electrons in the secondary electron multiplier by repelling toward the mesh target and measuring a time difference between a secondary electron detection time on the secondary electron multiplier and a secondary ion detection time on the secondary ion detector, thereby effecting a quantitative analysis of hydrogen atoms on a solid surface of the target on the Cu mesh.