JP2533178B

PURPOSE:To achieve work of connecting and separating a tester head manually with ease and accurately by controlling the tester head loaded with a spring with a lifting and rotating mechanism provided on a stand. CONSTITUTION:A sample carried on a sample base provided on a stand 1 is tested through a tester head 2 placed on the top of an electron beam tester. This head 2 is loaded with a spring provided between a side frame 10 and the head 2 and the vertical movement and holding thereof are controlled with a vertical guide table 3 and a vertically holding mechanism 4 between the stand 1 and the frame. Like, the rotation and holding of the head are controlled with a rotation mechanism 5 and a rotation holding mechanism 6. With such an arrangement, the tester head weighting 100-200kg can be separated manually from the stand with ease and accurately to connect an exchange tester head to the stand.