JP2518141B
PURPOSE:To form the infrared absorbing layers of an infrared detector on the required parts only. CONSTITUTION:An infrared detector is provided with a plurality of infrared sensors 4 placed at predetermined intervals on a semiconductor substrate 1, an insulating film 2 for covering and protecting th...
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Sprache: | eng |
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Zusammenfassung: | PURPOSE:To form the infrared absorbing layers of an infrared detector on the required parts only. CONSTITUTION:An infrared detector is provided with a plurality of infrared sensors 4 placed at predetermined intervals on a semiconductor substrate 1, an insulating film 2 for covering and protecting the infrared sensors 4, and infrared absorbing layers 5 laminated on the insulating layer 2. In addition, resistors 3 covered with the insulating film 2 are placed on the regions except the detecting regions of the infrared sensors 4. In depositing the infrared absorbing layers 5, an electric current is carried to the resistors 3 for generating heat to dissolve the unrequired parts in the absorbing layers, individually forming the infrared absorbing layers 5 on the infrared sensors 4 only. Thus, crosstalk between the infrared sensors 4 is reduced. |
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