METHOD FOR ALIGNING MULTIPLE SECONDARY ELECTRON BEAMS

To provide a method capable of performing overall alignment between multiple secondary electron beams and a plurality of detection elements by utilizing information on an image in which a corner beam is not captured as well as information on an image in which a corner beam is captured.SOLUTION: A me...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ISHII KOICHI, ITO YOSUKE, MIKAMI SHOHEI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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