WAFER HOLDER

To provide a wafer holder, having a top plate vacuum-sucked to a base plate, which allows a temperature sensor to be disposed without impeding the vacuum suction.SOLUTION: A wafer holder comprises: a top plate having an upper surface on which a wafer is placed; and a base plate disposed under the to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ITAKURA KATSUHIRO, KITABAYASHI KEIJI, FUJII AKINARI, SAKITA SHIGENOBU, KIMURA KOICHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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