GALLIUM NITRIDE SUBSTRATE

To provide a GaN substrate capable of reducing deterioration in yield when manufacturing a laser diode when used as a c-plane GaN substrate for laser diodes.SOLUTION: A gallium nitride substrate has a main surface having an inclination of 0-20 degrees from a (0001) plane and an area of 15 cm2 or mor...

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Hauptverfasser: INOUE CHIKAYOSHI, TASHIRO MASAYUKI, KAJIMOTO TETSUJI, FUKADA TAKASHI
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creator INOUE CHIKAYOSHI
TASHIRO MASAYUKI
KAJIMOTO TETSUJI
FUKADA TAKASHI
description To provide a GaN substrate capable of reducing deterioration in yield when manufacturing a laser diode when used as a c-plane GaN substrate for laser diodes.SOLUTION: A gallium nitride substrate has a main surface having an inclination of 0-20 degrees from a (0001) plane and an area of 15 cm2 or more. In a photoluminescence imaging image (a wavelength: 365 nm and an objective lens: 5 times) on the main surface, a stain-like pattern having a diameter of 50 μm or more is not observed.SELECTED DRAWING: None 【課題】レーザーダイオード用c面GaN基板として用いる場合に、レーザーダイオード製造時の歩留まり悪化を低減できるGaN基板を提供する。【解決手段】(0001)面からの傾斜が0~20度であり、面積が15cm2以上である主面を有する窒化ガリウム基板であって、前記主面のフォトルミネッセンスイメージング像(波長:365nm、対物レンズ5倍)において直径50μm以上のシミ状模様が観察されないことを特徴とする、窒化ガリウム基板。【選択図】なし
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subjects AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE
APPARATUS THEREFOR
CHEMISTRY
CRYSTAL GROWTH
METALLURGY
PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
REFINING BY ZONE-MELTING OF MATERIAL
SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
SINGLE-CRYSTAL-GROWTH
UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
title GALLIUM NITRIDE SUBSTRATE
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