MANUFACTURING METHOD OF WORK WITH PROTECTIVE MEMBRANE, MANUFACTURING METHOD OF INDIVIDUALIZED WORKPIECE WITH PROTECTIVE MEMBRANE, AND MANUFACTURING DEVICE FOR WORK WITH PROTECTIVE MEMBRANE

To provide a manufacturing method of a work with a protective membrane, the work with the protective membrane comprising a work including a circuit face and a protective membrane obtained by curing an energy beam curable protective membrane formation film, the manufacturing method of a work with a protective membrane suppressing the occurrence of wrinkles during energy beam curing, a manufacturing method of an individualized workpiece with a protective membrane, and a manufacturing device for the work with the protective membrane.SOLUTION: Provided are a manufacturing method of a work with a protective membrane, a manufacturing method of an individualized workpiece with a protective membrane and a manufacturing device for the work with the protective membrane. The manufacturing method of the work with the protective membrane successively includes: a lamination step of laminating a protective membrane formation film (13) on a face of a work such as a wafer (9) at an opposite side of a circuit face; and a curing step of forming the protective membrane by performing energy beam irradiation (E) on the protective membrane formation film (13) while applying cooling processing to the protective membrane formation film (13).SELECTED DRAWING: Figure 1C 【課題】回路面を有するワークと、エネルギー線硬化性の保護膜形成フィルムを硬化させて得られる保護膜とを備える保護膜付きワークの製造方法であって、エネルギー線硬化時に皺の発生が抑制される保護膜付きワークの製造方法、及び、保護膜付き個片化ワーク加工物の製造方法、並びに、保護膜付きワークの製造装置の提供。【解決手段】ウエハ（９）等のワークの回路面とは反対側の面に、保護膜形成フィルム（１３）を積層する積層工程と、保護膜形成フィルム（１３）に対して冷却処理を施しながら、保護膜形成フィルム（１３）に対して、エネルギー線照射（Ｅ）して保護膜を形成する硬化工程と、をこの順に備える、保護膜付きワークの製造方法、及び、保護膜付き個片化ワーク加工物の製造方法、並びに、保護膜付きワークの製造装置の提供。【選択図】図１Ｃ