LIGHT DETECTION DEVICE, METHOD FOR MANUFACTURING LIGHT DETECTION DEVICE, AND ELECTRONIC APPARATUS
To provide a light detection device capable of suppressing optical color mixing.SOLUTION: It is configured so that a trench part comprises a portion (a first trench part) on a back surface side of a semiconductor substrate and a portion (a second trench part) on a front surface side thereof. In addi...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a light detection device capable of suppressing optical color mixing.SOLUTION: It is configured so that a trench part comprises a portion (a first trench part) on a back surface side of a semiconductor substrate and a portion (a second trench part) on a front surface side thereof. In addition, a distance from a portion that forms a side wall surface of a first element region of an inner wall surface of the second trench part to a center of the first element region in a groove width direction is set shorter than a distance from a portion that forms a side wall surface of a second element region of the inner wall surface of the second trench part 20 to a center of an element region 17R in the groove width direction.SELECTED DRAWING: Figure 2
【課題】 光学混色を抑制可能な光検出装置を提供すること。【解決手段】 トレンチ部を、半導体基板の裏面側の部分(第1トレンチ部)と、表面側の部分(第2トレンチ部)とを含む構成とした。また、第2トレンチ部の内壁面のうちの第1素子領域の側壁面を形成する部分から第1素子領域の中心までの溝幅方向の距離を、第2トレンチ部20の内壁面のうちの第2素子領域の側壁面を構成する部分から素子領域17Rの中心までの溝幅方向の距離よりも短くした。【選択図】図2 |
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