INFORMATION PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

To adjust the operation performed by a substrate processing apparatus according to the state of the substrate processing apparatus.SOLUTION: An information processing apparatus is provided that is capable of communicating with a substrate processing apparatus that processes a workpiece, and includes an input unit that accepts input of recipe information indicating a series of processes for the workpiece, a command conversion unit that generates a command sequence indicating operations to be performed by the substrate processing apparatus on the basis of the recipe information, a command optimization unit that generates an adjustment method indicating a procedure for adjusting the command sequence depending on the state of the substrate processing apparatus, and an output unit that outputs the command sequence and the adjustment method to the substrate processing apparatus.SELECTED DRAWING: Figure 4 【課題】基板処理装置の状態に応じて基板処理装置が実行する操作を調整する。【解決手段】被処理体を処理する基板処理装置と通信可能な情報処理装置であって、被処理体に対する一連の処理を示すレシピ情報の入力を受け付ける入力部と、レシピ情報に基づいて基板処理装置が実行する操作を示すコマンド列を生成するコマンド変換部と、基板処理装置の状態に応じてコマンド列を調整する手順を示す調整方法を生成するコマンド最適化部と、コマンド列及び調整方法を基板処理装置に出力する出力部と、を備える情報処理装置が提供される。【選択図】図４