CLEANING METHOD, COATING DEVICE, AND CLEANING TOOL

To provide a cleaning method that uses a cleaning tool to clean a wider range in the height direction inside a container of a spin coating device.SOLUTION: A cleaning method for cleaning a spin coating device by holding a cleaning jig 50 on a rotary holding device includes forming a peripheral ceiling portion 54 and a peripheral bottom portion 55 in the circumferential direction on the peripheral portion of the cleaning jig, continuously forming discharge ports 56 in the circumferential direction between the peripheral ceiling portion and the peripheral bottom portion, forming a plurality of holes 61 in the peripheral bottom portion at intervals in the circumferential direction, obliquely inclining the lower surface of the peripheral ceiling portion toward the upper outer periphery, rotating the cleaning jig at a first rotation speed while holding the cleaning jig on the rotary holding device, supplying cleaning liquid to the bottom of the cleaning jig, allowing the cleaning liquid to accumulate in the discharge port through a guide path from the bottom, reaching the cleaning liquid to the inner cup, and rotating the cleaning jig at a second rotation speed higher than the first rotation speed while allowing the cleaning liquid accumulated in the discharge port to reach a portion of the outer cup located above the discharge port.SELECTED DRAWING: Figure 3 【課題】回転塗布装置の容器内を高さ方向により広い範囲を洗浄する洗浄用治具を用いた洗浄方法を提供する。【解決手段】回転保持装置に洗浄用治具５０を保持させて回転塗布装置を洗浄する洗浄方法であって、洗浄用治具の周縁部に周縁天井部５４と周縁底部５５とが周方向に形成され、周縁天井部と周縁底部との間に吐出口５６が全周に亘って連続して周方向に形成され、周縁底部に孔６１が周方向に間隔をもって複数形成され、周縁天井部の下面は、外周上方に向けて斜めに傾斜し、回転保持装置に洗浄用治具を保持した状態で第一の回転数で洗浄用治具を回転させ、洗浄用治具の底部に洗浄液を供給して、底部から誘導路を通して吐出口に洗浄液を溜めること、内カップに洗浄液を到達させること、第一の回転数より高回転の第二の回転数で洗浄用治具を回転させながら、吐出口に溜まっている洗浄液を吐出口より上方に位置する外カップの部位に到達させることを含む。【選択図】図３