PEDESTAL SETUP USING CAMERA WAFER

To provide devices and methods for setting up a pedestal using a camera wafer.SOLUTION: A fixture 200 for aligning a pedestal to a showerhead in a processing chamber comprises an annular platform 202, N supporting members, and N pins 210, N being an integer greater than two. The N supporting members...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	RACHEL E BATZER, TED TAN, BOONYARIT WOONPRASERT, VIVEKANANDAN KRISHNASWAMY, PRASANNA KULKARNI, SHAWN FIEDLER
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	To provide devices and methods for setting up a pedestal using a camera wafer.SOLUTION: A fixture 200 for aligning a pedestal to a showerhead in a processing chamber comprises an annular platform 202, N supporting members, and N pins 210, N being an integer greater than two. The N supporting members (contact pads 208) support the annular platform in a plane parallel to and above the top surface of the pedestal. The N pins are arranged perpendicularly to the plane along a circumference of the annular platform. Each of the N pins includes threads 214 which are engageable with respective threaded slots in a device. Each of the N pins includes a conical portion 216 facing the top surface of the pedestal and engageable with a periphery of the top surface of the pedestal. A method comprises aligning a center of the annular platform to a center of the pedestal by adjusting one or more of the N pins.SELECTED DRAWING: Figure 2 【課題】カメラウエハを使用して台座をセットアップする装置及び方法を提供する。【解決手段】処理チャンバ内で台座をシャワーヘッドに位置合わせするための固定具２００は、環状プラットフォーム２０２、Ｎ個の支持部材およびＮ個のピン２１０を備え、Ｎは、２よりも大きい整数である。Ｎ個の支持部材（接触パッド２０８）は、台座の上面に平行かつ上方の平面内で環状プラットフォームを支持する。Ｎ個のピンは、環状プラットフォームの円周に沿って平面に対して垂直に配置される。Ｎ個のピンの各々は、装置内のそれぞれのねじ付きスロットと係合可能なねじ山２１４を含む。Ｎ個のピンの各々は、台座の上面を向いており、台座の上面の周囲と係合可能な円錐部分２１６を含む。方法は、Ｎ個のピンの１つまたは複数を調整することによって、環状プラットフォームの中心を台座の中心に位置合わせする。【選択図】図２