EMBEDDED OPTICAL WAVEGUIDE STRUCTURE, INTEGRATED SEMICONDUCTOR LASER DEVICE, AND METHOD FOR MANUFACTURING EMBEDDED OPTICAL WAVEGUIDE STRUCTURE

To provide an improved and novel embedded optical waveguide structure, an integrated semiconductor laser device, and a method for manufacturing the embedded optical waveguide structure with which it is possible, for example, to suppress a decrease in optical characteristics due to the occurrence of voids.SOLUTION: In an embedded optical waveguide structure, a waveguide, for example, includes a first section, a second section whose width is narrower than the first section, and a third section which is adjacent to the first second in a third direction, optically connected to the first section, and has an end face in the third direction, a first direction is the direction of a crystal orientation [100], a second direction is the direction of a crystal orientation [0-11] or a crystal orientation [01-1], and the third direction is the direction of a crystal orientation [011] or a crystal orientation [0-1-1]. The normal at each position of the end face faces a direction between the first and second directions or between a direction opposite the second direction and the third direction, and inclined with respect to the direction of a crystal orientation [111] or the direction of a crystal orientation [1-1-1].SELECTED DRAWING: Figure 1 【課題】例えば、ボイドの発生に伴う光学的特性の低下を抑制することが可能となるような、改善された新規な埋込型光導波路構造、集積型半導体レーザ装置、および埋込型光導波路構造の製造方法を得る。【解決手段】埋込型光導波路構造は、例えば、導波路は、第一部位と、当該第一部位より幅が狭い第二部位と、第一部位に対して第三方向に隣接し、第一部位と光学的に接続され、第三方向の端面を有した第三部位と、を有し、第一方向は、結晶方位［１００］方向であり、第二方向は、結晶方位［０－１１］方向または結晶方位［０１－１］方向であり、第三方向は、結晶方位［０１１］方向または結晶方位［０－１－１］方向であり、端面の各位置における法線方向は、第一方向と第二方向または第二方向の反対方向と第三方向との間の方向を向くとともに、結晶方位［１１１］方向または結晶方位［１－１－１］方向に対して傾斜している。【選択図】図１