LINEAR MOTOR, POSITIONING DEVICE, PROCESSING DEVICE, AND DEVICE MANUFACTURING METHOD

To provide a linear motor or the like that can increase rigidity.SOLUTION: A linear motor includes: a plurality of three-phase coil groups 41 to 45 that are arranged in a line and generate linear power along an arrangement direction in response to a three-phase AC current; and inter-coil reinforcing members 51-54 provided between the plurality of three-phase coil groups 41 to 45. The width of the inter-coil reinforcing members 51 to 54 along the arrangement direction is equal to 60 degrees in terms of the electric angle of the three-phase current, in two three-phase coil groups 41 and 42 adjacent to each other in the arrangement direction via the inter-coil reinforcing member 51, through which three-phase AC currents of opposite phases flow, an U-phase coil, a V-phase coil, and a W-phase coil are arranged in this order in the first three-phase coil group 41, and the V-phase coil, the W-phase coil, and the U-phase coil are arranged in this order in the second three-phase coil group 42.SELECTED DRAWING: Figure 4 【課題】剛性を高められるリニアモータ等を提供する。【解決手段】リニアモータは、直線状に配列される複数の三相コイル群４１～４５であって、流される三相交流に応じて配列方向に沿った直線動力を発生させる複数の三相コイル群４１～４５と、複数の三相コイル群４１～４５の間に設けられるコイル間補強部材５１～５４と、を備える。コイル間補強部材５１～５４の配列方向に沿った幅は、三相交流の電気角に換算して60度に等しく、コイル間補強部材５１を介して配列方向に隣接し、互いに逆位相の三相交流が流される二つの三相コイル群４１、４２において、第１の三相コイル群４１ではＵ相コイル、Ｖ相コイル、Ｗ相コイルの配列順になっており、第２の三相コイル群４２ではＶ相コイル、Ｗ相コイル、Ｕ相コイルの配列順になっている。【選択図】図４