INSPECTION SYSTEM AND METHOD FOR CONTROLLING TEMPERATURE

To provide an inspection system for inspecting a substrate while preferably controlling a temperature, and a method for controlling a temperature.SOLUTION: An inspection system for inspecting a substrate while preferably controlling a temperature includes: a substrate holding unit for holding the substrate; a detection unit for supplying inspection power to an electrode part of the substrate; a holding unit temperature adjusting mechanism for detecting the temperature of the substrate holding unit and adjusting the temperature of the substrate holding unit; and a detection unit temperature adjusting mechanism for detecting the temperature of the detection unit and adjusting the temperature of the detection unit; and a control unit. The control unit performs an inspection of the substrate while adjusting the temperature control by the holding unit temperature adjusting mechanism and the detection unit temperature adjusting mechanism.SELECTED DRAWING: Figure 2 【課題】好適に温度制御を行いながら基板を検査する検査システム及び温度制御方法を提供する。【解決手段】温度制御を行いながら、基板を検査する検査システムであって、前記基板を保持する基板保持部と、前記基板の電極部に検査電力を供給する検出部と、前記基板保持部の温度を検出し、前記基板保持部の温度を調整する保持部温度調整機構と、前記検出部の温度を検出し、前記検出部の温度を調整する検出部温度調整機構と、制御部と、を備え、前記制御部は、前記保持部温度調整機構及び前記検出部温度調整機構の行う温度制御を調整しながら、前記基板の検査を行う、検査システム。【選択図】図２