DEVICE AND METHOD FOR TRANSFERRING FINE STRUCTURE

To provide a fine structure transfer device and a fine structure transfer method capable of fixing a plurality of replicas to a sheet-like body (a film).SOLUTION: A fine structure transfer device 1 includes: an unwinder 5 for a flexible sheet-like body 4; a winder 6 for the sheet-like body 4 via a plurality of guide rolls 3; a mold 14 that is arranged between the unwinder 5 and the winder 6 and on whose surface on which a fine uneven pattern is formed photocurable resin is applied or a stage 11 on which a substrate is mounted on which the photocurable resin is applied; an imprint roll 2 that reciprocates at least between both ends of the mold 14 or the substrate while pressing the sheet-like body 4 against the mold 14 or the substrate from above; and a curing light irradiator 8 for irradiating the pressed sheet-like body 4 with ultraviolet light. The fine structure transfer device continuously fixes a plurality of replicas on the sheet-like body 4 or transfers the fine uneven pattern of the replica to the substrate. The fine structure transfer device performs position control of a position of a second guide roll 3b in a vertical direction and a horizontal direction with respect to the position of the imprint roll.SELECTED DRAWING: Figure 1 【課題】シート状体（フィルム）に複数のレプリカを固着し得る微細構造転写装置及び微細構造転写方法を提供する。【解決手段】微細構造転写装置１は、可撓性を有するシート状体４の巻出機５と、複数のガイドロール３を介してシート状体４の巻取機６と、巻出機５と巻取機６の間に配され、微細凹凸パターンが形成された表面に光硬化性樹脂が塗布されたモールド１４又は表面に光硬化性樹脂が塗布された基板を載置するステージ１１と、上方よりシート状体４をモールド１４または基板に押圧しつつ、少なくともモールド１４または基板の両端部間を往復移動するインプリントロール２と、押圧されたシート状体４に紫外光を照射する硬化光照射器８と、を備え、シート状体４に複数のレプリカを連続的に固着、又は基板にレプリカの微細凹凸パターンを転写する。第２ガイドロール３ｂの位置を、インプリントロールの位置に対し、鉛直方向および水平方向の位置制御を行う。【選択図】図１