HIGH-FREQUENCY POWER SUPPLY SYSTEM

To reduce reflected wave power on a first power supply side in both a second power supply ON period and a second power supply OFF period.SOLUTION: A high-frequency power supply system according to the present disclosure includes a first power supply, a second power supply, a first matcher, and a sec...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UENO TAKEYA, HASEGAWA YUICHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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