HIGH-FREQUENCY POWER SUPPLY SYSTEM

To reduce reflected wave power on a first power supply side in both a second power supply ON period and a second power supply OFF period.SOLUTION: A high-frequency power supply system according to the present disclosure includes a first power supply, a second power supply, a first matcher, and a sec...

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Bibliographische Detailangaben
Hauptverfasser:	UENO TAKEYA, HASEGAWA YUICHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:	To reduce reflected wave power on a first power supply side in both a second power supply ON period and a second power supply OFF period.SOLUTION: A high-frequency power supply system according to the present disclosure includes a first power supply, a second power supply, a first matcher, and a second matcher. The second power supply performs pulse modulation of repeating an ON operation of outputting a second forward wave voltage and an OFF operation of not outputting the second forward wave voltage. The first power supply performs frequency modulation control in a second power supply ON period, and performs frequency offset control of outputting a forward wave voltage VF3 having a fundamental frequency F3 obtained by adding an offset frequency to a fundamental frequency F1 in a second power supply OFF period.SELECTED DRAWING: Figure 16 【課題】第２電源ＯＮ期間及び第２電源ＯＦＦ期間の両方の期間において第１電源側の反射波電力の電力値を小さくする。【解決手段】本開示に係る高周波電力供給システムは、第１電源と第２電源と第１整合器と第２整合器とを有する。第２電源は、第２進行波電圧を出力するＯＮ動作と第２進行波電圧を出力しないＯＦＦ動作とを繰り返すパルス変調を行う。第１電源は、第２電源ＯＮ期間では周波数変調制御を行い、第２電源ＯＦＦ期間では、基本周波数Ｆ１にオフセット周波数を加えた基本周波数Ｆ３を有する進行波電圧ＶＦ３を出力する周波数オフセット制御を行う。【選択図】図１６