HIGH-FREQUENCY POWER SUPPLY SYSTEM
To reduce reflected wave power on a first power supply side in both a second power supply ON period and a second power supply OFF period.SOLUTION: A high-frequency power supply system according to the present disclosure includes a first power supply, a second power supply, a first matcher, and a sec...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; jpn |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | UENO TAKEYA HASEGAWA YUICHI |
| description | To reduce reflected wave power on a first power supply side in both a second power supply ON period and a second power supply OFF period.SOLUTION: A high-frequency power supply system according to the present disclosure includes a first power supply, a second power supply, a first matcher, and a second matcher. The second power supply performs pulse modulation of repeating an ON operation of outputting a second forward wave voltage and an OFF operation of not outputting the second forward wave voltage. The first power supply performs frequency modulation control in a second power supply ON period, and performs frequency offset control of outputting a forward wave voltage VF3 having a fundamental frequency F3 obtained by adding an offset frequency to a fundamental frequency F1 in a second power supply OFF period.SELECTED DRAWING: Figure 16
【課題】第２電源ＯＮ期間及び第２電源ＯＦＦ期間の両方の期間において第１電源側の反射波電力の電力値を小さくする。【解決手段】本開示に係る高周波電力供給システムは、第１電源と第２電源と第１整合器と第２整合器とを有する。第２電源は、第２進行波電圧を出力するＯＮ動作と第２進行波電圧を出力しないＯＦＦ動作とを繰り返すパルス変調を行う。第１電源は、第２電源ＯＮ期間では周波数変調制御を行い、第２電源ＯＦＦ期間では、基本周波数Ｆ１にオフセット周波数を加えた基本周波数Ｆ３を有する進行波電圧ＶＦ３を出力する周波数オフセット制御を行う。【選択図】図１６ |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2024095370A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2024095370A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2024095370A3</originalsourceid><addsrcrecordid>eNrjZFDy8HT30HULcg0MdfVzjlQI8A93DVIIDg0I8IlUCI4MDnH15WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpeakl8V4BRgZGJgaWpsbmBo7GRCkCAJ5WIzs</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>HIGH-FREQUENCY POWER SUPPLY SYSTEM</title><source>esp@cenet</source><creator>UENO TAKEYA ; HASEGAWA YUICHI</creator><creatorcontrib>UENO TAKEYA ; HASEGAWA YUICHI</creatorcontrib><description>To reduce reflected wave power on a first power supply side in both a second power supply ON period and a second power supply OFF period.SOLUTION: A high-frequency power supply system according to the present disclosure includes a first power supply, a second power supply, a first matcher, and a second matcher. The second power supply performs pulse modulation of repeating an ON operation of outputting a second forward wave voltage and an OFF operation of not outputting the second forward wave voltage. The first power supply performs frequency modulation control in a second power supply ON period, and performs frequency offset control of outputting a forward wave voltage VF3 having a fundamental frequency F3 obtained by adding an offset frequency to a fundamental frequency F1 in a second power supply OFF period.SELECTED DRAWING: Figure 16
【課題】第２電源ＯＮ期間及び第２電源ＯＦＦ期間の両方の期間において第１電源側の反射波電力の電力値を小さくする。【解決手段】本開示に係る高周波電力供給システムは、第１電源と第２電源と第１整合器と第２整合器とを有する。第２電源は、第２進行波電圧を出力するＯＮ動作と第２進行波電圧を出力しないＯＦＦ動作とを繰り返すパルス変調を行う。第１電源は、第２電源ＯＮ期間では周波数変調制御を行い、第２電源ＯＦＦ期間では、基本周波数Ｆ１にオフセット周波数を加えた基本周波数Ｆ３を有する進行波電圧ＶＦ３を出力する周波数オフセット制御を行う。【選択図】図１６</description><language>eng ; jpn</language><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; PLASMA TECHNIQUE ; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS ; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240710&DB=EPODOC&CC=JP&NR=2024095370A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240710&DB=EPODOC&CC=JP&NR=2024095370A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>UENO TAKEYA</creatorcontrib><creatorcontrib>HASEGAWA YUICHI</creatorcontrib><title>HIGH-FREQUENCY POWER SUPPLY SYSTEM</title><description>To reduce reflected wave power on a first power supply side in both a second power supply ON period and a second power supply OFF period.SOLUTION: A high-frequency power supply system according to the present disclosure includes a first power supply, a second power supply, a first matcher, and a second matcher. The second power supply performs pulse modulation of repeating an ON operation of outputting a second forward wave voltage and an OFF operation of not outputting the second forward wave voltage. The first power supply performs frequency modulation control in a second power supply ON period, and performs frequency offset control of outputting a forward wave voltage VF3 having a fundamental frequency F3 obtained by adding an offset frequency to a fundamental frequency F1 in a second power supply OFF period.SELECTED DRAWING: Figure 16
【課題】第２電源ＯＮ期間及び第２電源ＯＦＦ期間の両方の期間において第１電源側の反射波電力の電力値を小さくする。【解決手段】本開示に係る高周波電力供給システムは、第１電源と第２電源と第１整合器と第２整合器とを有する。第２電源は、第２進行波電圧を出力するＯＮ動作と第２進行波電圧を出力しないＯＦＦ動作とを繰り返すパルス変調を行う。第１電源は、第２電源ＯＮ期間では周波数変調制御を行い、第２電源ＯＦＦ期間では、基本周波数Ｆ１にオフセット周波数を加えた基本周波数Ｆ３を有する進行波電圧ＶＦ３を出力する周波数オフセット制御を行う。【選択図】図１６</description><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>PLASMA TECHNIQUE</subject><subject>PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS</subject><subject>PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFDy8HT30HULcg0MdfVzjlQI8A93DVIIDg0I8IlUCI4MDnH15WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpeakl8V4BRgZGJgaWpsbmBo7GRCkCAJ5WIzs</recordid><startdate>20240710</startdate><enddate>20240710</enddate><creator>UENO TAKEYA</creator><creator>HASEGAWA YUICHI</creator><scope>EVB</scope></search><sort><creationdate>20240710</creationdate><title>HIGH-FREQUENCY POWER SUPPLY SYSTEM</title><author>UENO TAKEYA ; HASEGAWA YUICHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2024095370A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2024</creationdate><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>PLASMA TECHNIQUE</topic><topic>PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS</topic><topic>PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</topic><toplevel>online_resources</toplevel><creatorcontrib>UENO TAKEYA</creatorcontrib><creatorcontrib>HASEGAWA YUICHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>UENO TAKEYA</au><au>HASEGAWA YUICHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>HIGH-FREQUENCY POWER SUPPLY SYSTEM</title><date>2024-07-10</date><risdate>2024</risdate><abstract>To reduce reflected wave power on a first power supply side in both a second power supply ON period and a second power supply OFF period.SOLUTION: A high-frequency power supply system according to the present disclosure includes a first power supply, a second power supply, a first matcher, and a second matcher. The second power supply performs pulse modulation of repeating an ON operation of outputting a second forward wave voltage and an OFF operation of not outputting the second forward wave voltage. The first power supply performs frequency modulation control in a second power supply ON period, and performs frequency offset control of outputting a forward wave voltage VF3 having a fundamental frequency F3 obtained by adding an offset frequency to a fundamental frequency F1 in a second power supply OFF period.SELECTED DRAWING: Figure 16
【課題】第２電源ＯＮ期間及び第２電源ＯＦＦ期間の両方の期間において第１電源側の反射波電力の電力値を小さくする。【解決手段】本開示に係る高周波電力供給システムは、第１電源と第２電源と第１整合器と第２整合器とを有する。第２電源は、第２進行波電圧を出力するＯＮ動作と第２進行波電圧を出力しないＯＦＦ動作とを繰り返すパルス変調を行う。第１電源は、第２電源ＯＮ期間では周波数変調制御を行い、第２電源ＯＦＦ期間では、基本周波数Ｆ１にオフセット周波数を加えた基本周波数Ｆ３を有する進行波電圧ＶＦ３を出力する周波数オフセット制御を行う。【選択図】図１６</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng ; jpn |
| recordid | cdi_epo_espacenet_JP2024095370A |
| source | esp@cenet |
| subjects | ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS |
| title | HIGH-FREQUENCY POWER SUPPLY SYSTEM |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-24T18%3A43%3A50IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=UENO%20TAKEYA&rft.date=2024-07-10&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2024095370A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |